FOR PHOTO
LAMP FOR WAFER EDGE EXPOSURE
| EQUIPMENT | LAMP | |
| TEL | ACT12 | LP2502T, T250 |
| ACT8 | LP2502T, T250 | |
| MARK 7, 8, 5z | HOYA 210HS-D2 | |
| MARK 5 | UXM-200YA | |
| LITHIUS | LP2511T, T(H) | |
| DNS | SK2000 (I LINE) | L8831 |
| SK2000 (KRF) | L8832 | |
| SK3000 (I LINE) | L8831 | |
| SK3000 (KRF) | L8832 | |
| RF CUBE (I LINE) | L8831 | |
| RF CUBE (KRF) | L8832 | |
| 60B/80B (I LINE) | L6190, L2570-04DS | |
| 60B/80B (DUV) | L2423-02 | |
| TRACK 200 (I LINE) | L6831 | |
| TRACK 200 (DUV) | L6832 | |
| TORAY | TRTE-65TRE | HOYA 250DL |
| TRD-72D | USH-250LT | |
| TRTE-92TRE | TOSHIBA SH1002MA | |
SPOT CURE
| HAMAMATSU | L8253 |
| L8251 | |
| PANASONIC | ANUPS204 |
| HOYA | MX200 |
| USHIO | UXM-Q256BY |
EDGE EXPOSURE
| HOYA | 250AF |
